• English
  • Français
  • Deutsch
  • Español
  • 日本語


Nanofabrication


Nanofabrication encompasses diverse fields such as; nanophotonic and solid state circuits, microelectromechanical systems, and microfluidic systems. The Elionix electron beam lithography (EBL) tools are known for ultra-high precision to fabricate small nano-structures, excellent reliability, small footprint, and low cost of ownership.

Since 1975, Elionix has made significant contributions in the fields of fine processing, and measurement and analysis. The Elionix corporate philosophy is that of two CSs; Challenge and Speed, and Customer Satisfaction. To date, Elionix has sold over 350 EBL systems to research institutes and industrial customers worldwide.

Electron Beam Lithography


...
Hover
ELS-F125
  • 125kV Column
  • 8” (200mm) Stage
  • 5nm lines or less (guaranteed)
...
Hover
ELS-F100
  • 100kV Column
  • 8” (200mm) Stage
  • 6nm lines or less (guaranteed)
...
Hover
ELS-G100
  • 100kV Column
  • 6” (150mm) Stage
  • 6nm lines or less (guaranteed)

Electron Beam
Lithography Systems:

For over 40 years, Elionix has been exhaustive in their pursuit of quality and performance. This has made them the global leader in Electron Beam Lithography.

At Elionix, the emphasis is on engineering systems that are stable, robust and offer high utilization rates. Learn More >>

Electron Beam Lithography Images:

  • The Elionix 125kV and 100kV EBL systems offer ultra fine lines and pitch pattern

  • The Elionix Circle Pattern Generator (CPG) enables fine, smooth, and fast writing of ring and arc patterns

  • The Elionix EBL Systems feature fast writing on large fields with minimal distortion at high beam currents


October 23, 2015