Electron Beam Lithography Systems
Since 1975, Elionix has made significant contributions to the field of fabrication, measurement, and analysis. Elionx has installed over 400 Electron Beam Lithography (EBL) systems to research institutes and industrial customers worldwide.
ELS-BODEN Research Series EBL Tools
  • Combines ultra high resolution with throughput.
  • Available in 200mm and 300mm configurations.
  • Complete line of automatic loading systems.
ELS-BODEN Σ Production Series EBL Tools
  • 400MHz high speed scan clock
  • High speed stage for production
  • Available in 200mm and 300mm configurations
  • Full lineup of robotic loaders
Installations
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Established
1900
Countries
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Electron Beam Lithography Products

Research Tools

Production Tools

Electron Beam Lithography Products

Research Tools

Production Tools

Global Reach

STS-Elionix is a partnership dedicated to delivering state-of-the-art nanotechnology products throughout North America and Europe.

Who We Serve

National Laboratories

Research Universities

Industry

News & Blog

Scanning electron micrograph of fabricated amorphous silicon nonlocal metasurfaces (scale bar = 2 μm) on a glass substrate.

Nonlinear metasurfaces

Metasurfaces contain structured matter at the subwavength scale which allow unprecedented optical properties and functionalities compared to naturally occurring materials. One emerging technology in this

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