ELS-Boden Research Series EBL Tools

  • Combines ultra high resolution with throughput.
  • Available in 200mm and 300mm configurations.
  • Complete line of automatic loading systems.
Electron Beam Lithography Systems
Since 1975, Elionix has made significant contributions to the field of fabrication, measurement, and analysis. Elionx has installed over 400 Electron Beam Lithography (EBL) systems to research institutes and industrial customers worldwide.
ELS-BODEN Research Series EBL Tools
  • Combines ultra high resolution with throughput.
  • Available in 200mm and 300mm configurations.
  • Complete line of automatic loading systems.
ELS-BODEN Σ Production Series EBL Tools
  • 400MHz high speed scan clock
  • High speed stage for production
  • Available in 200mm and 300mm configurations
  • Full lineup of robotic loaders
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Electron Beam Lithography Products

Electron Beam Lithography Research Tools

Research Tools

Electron Beam Lithography Production Tools

Production Tools

Electron Beam Lithography Products

Research Tools

ELS-BODEN

ELS -Boden Series

Production Tools

ELS-BODEN_SIGMA

ELS-Boden Σ Series

ELS-G100_0

ELS-G100

ELS-F125

ELS-F125

ELS - S50EX

ELS-S50EX

Electron Beam Lithography Production Tools

ELF-10000

Global Reach

STS-Elionix is a partnership dedicated to delivering state-of-the-art nanotechnology products throughout North America and Europe. 

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