ELS-Boden Research Series EBL Tools

Combines ultra high resolution with throughput.
Available in 200mm and 300mm configurations.
Complete line of automatic loading systems.

Electron Beam Lithography Systems

Since 1975, Elionix has made significant contributions to the field of fabrication, measurement, and analysis. Elionx has installed over 400 Electron Beam Lithography (EBL) systems to research institutes and industrial customers worldwide.

ELS-BODEN Research Series EBL Tools

Combines ultra high resolution with throughput.
Available in 200mm and 300mm configurations.
Complete line of automatic loading systems.

ELS-BODEN Σ Production Series EBL Tools

400MHz high speed scan clock
High speed stage for production
Available in 200mm and 300mm configurations
Full lineup of robotic loaders

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Installations

1900

Established

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Countries

Electron Beam Lithography Products

Research Tools

Production Tools

Electron Beam Lithography Products

Research Tools

ELS Boden Series

Production Tools

ELS-Boden Σ Series

ELS-S50EX

ELF-10000

Global Reach

STS-Elionix is a partnership dedicated to delivering state-of-the-art nanotechnology products throughout North America and Europe.

Who We Serve

National Laboratories

Research Universities

Industry

Applications

3D Photonics Structure

Photonic Crystal Fiber

3D Photonics Structure

SAW Pattern

Nano-Gap

Aspect Ratio

Image of NTNU two height hexagonal SU-8 pillar arrays

EBL Fabrication of Nanostructures for Cell Studies

Nano- and microscale fabricated structures made of SU-8 and other polymers have been used in research to study biological cell behavior such as mechanotransduction, membrane

February 7, 2023

MIT.nano Elionix ELS-HS50 Complete Image

MIT.nano Installs Elionix ELS-HS50 for High-Speed EBL Applications

STS-Elionix is pleased to announce the successful installation of the Elionix ELS-HS50 at MIT.nano. The ELS-HS50 is a high-speed electron beam lithography tool that can

October 19, 2022

Elionix Nanofabrication Image of Morpho Butterflys

Fabrication of 3D Morpho Structures with a 50kV EBL Tool

A 3D morpho butterfly with bright blue reflection pattern was successfully fabricated using the Elionix BODEN 50kv tool.

September 15, 2022

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