About Us

Nanotechnology Products by STS-Elionix

STS-Elionix is a partnership that delivers state-of-the-art nanotechnology products throughout North America and Europe. The Elionix electron beam lithography (EBL) systems are built to meet customer demands for finer lines and writing speeds. This customer centric approach resulted in the world’s first 150kV EBL system for research as well as the world’s first 400MHz beam deflection system on production EBL tools.

Global Reach

STS-Elionix is a partnership dedicated to delivering state-of-the-art nanotechnology products throughout North America and Europe. Speak to an expert today!

SEMTech Solutions (STS), incorporated in 2000, has sold hundreds of electron beam products to the scanning electron microscopy (SEM) industry. Our main emphasis is the refurbishment and service of scanning electron microscopes (SEMs) worldwide. Our dedicated team of electron beam professionals, located throughout North America and Europe, take pride in a solid working relationship with our customer base, which includes Fortune 500 companies, major research institutes, and technology driven start-ups.

SEMTech Solutions

Who We Serve

National Laboratories

Research Universities



Since 1975, Elionix has been manufacturing, installing, and servicing Electron Beam Lithography (EBL) systems. During that time, Elionix has sold over 400 EBL systems to research institutes and industrial customers. The Elionix electron beam lithography tools are known for ultra-high precision to fabricate small nano-structures, high speed for production lines, excellent reliability, small footprint, and low cost of ownership.

Elionix HQ Address:

Elionix, Inc.
3-7-6 Motoyokoyama-cho Hachioji,
Tokyo 192-0063 Japan

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