Aspect Ratio of 100 Isolated Line Resist Thickness 1500nm Clear Line 15nm
Inner Ring D50nm & Outer Ring D80nm Donut Array
Line & Space (9nm) Pitch 50nm Using 1nA Beam Current
Nano-Gap For Non-volatile Memory
Quantum device
SAW pattern Resist Thickness 2000nm
Y type Demultiplexing (ultra-fine LER pattern)
Ring resonator (ultra-fine LER pattern)
Optical waveguide (Demultiplexing)
3D hologram pattern
Photonic Crystal Pattern
Photonic Crystal Pattern
3D Photonics Structure
Photonic Crystal Fiber
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