Elionix ELS-G100 Installation at the University at Buffalo

In December of 2020 an Elionix ELS-G100 was installed in the Davis Hall Cleanroom at the University at Buffalo, where it will equip faculty and students, as well as neighboring higher education institutions and tech-minded entrepreneurs in Western New York with access to new high-precision capabilities for research in nano-devices and nano-materials. The Davis Hall Cleanroom is among the most advanced in the Buffalo-Niagara region, allowing for electronic device research, processing and development, including study and fabrication of nanodevices.  The cleanroom was commissioned in 2012 and features class 1000 space, class 100 space, and seven bays of research equipment. 

“Advanced tools like this help to promote interdisciplinary research that can lead to discoveries in electronics, photonics, quantum technology and other fields,” says Kemper Lewis, dean of the School of Engineering and Applied Sciences. “It also enables collaborations with industry partners to support economic development and increase the number of tech savvy workers in Western New York.”

Electron Beam Lithography Production Tools

UB acquired the instrument by way of a successful National Science Foundation proposal led by electrical engineering professor Uttam Singisetti. According to Singisetti, “Electron Beam Lithography is an indispensable tool for nanotechnology research. It has applications in many fields and the potential to rapidly translate knowledge gained in UB’s laboratories to commercial applications.  The system that UB acquired allows for creation of devices less than 10 nanometers thick.  (By comparison, a typical sheet of paper is 100,000 nanometers thick).  That’s a significant improvement from UB’s current EBL capabilities.”

The ELS-G100 generates a highly stable beam with a diameter as small as 1.8nm, using acceleration voltages of up to 100kV, allowing fine patterns to be drawn with a minimum line width of 6nm or less.  The control software is Windows-based and incorporates our proprietary CAD software.  The easy-to-use graphical user interface is ideal for a multi-user environment, such as that in Davis Hall.  For more information about Elionix and its products, you can email sales@sts-elionix.com or visit our website at www.sts-elionix.com

Header Photo Credit: Ariel Namoca, University at Buffalo

Note: On June 1, 2021, the Elionix ELS-G100 was replaced by the Elionix ELS-BODEN 100.

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