ELMS Software

The Elionix ELMS software is a comprehensive suite of modules designed around many years of working in multi-user environments. The ELMS managerial workflow wraps the entire software modular sequences into one easy to use platform. The major modules include:

• VAC Vacuum monitor and autoloader control
• CALB Calibration for beam and write field
• EXP Exposure control
• CONV Conversion from GDS to CAR file
• METR Metrology with automated imaging
• BSCO Beam score tool to check beam quality
• ACCO Account management

In addition, the ELMS platform has a Python API and can be controlled through iPython notebooks, for a higher degree of automation.