ELMS Software

Elionix Lithography Management System

The Elionix ELMS software is a comprehensive suite of modules designed around many years of working in multi-user environments. The ELMS managerial workflow wraps the entire software modular sequences into one easy to use platform. The major modules include:

  • VAC Vacuum monitor and autoloader control
  • CALB Calibration for beam and write field
  • EXP Exposure control
  • CONV Conversion from GDS to CAR file
  • METR Metrology with automated imaging
  • BSCO Beam score tool to check beam quality
  • ACCO Account management

In addition, the ELMS platform has a Python API and can be controlled through iPython notebooks, for a higher degree of automation.