Both single cassette or multiple cassette autoloaders are available
HIGHER THROUGHPUT THAN EXISTING EBL SYSTEMS
The ELS-BODEN 50 EBL system reaches sub-micron scales unachievable via laser lithography. Designed for low volume device fabrication with minimal line edge roughness.
The elms software is a comprehensive electron beam lithography management user interface residing on a Win10 platform. From full production job scheduling, to SEM UI, to system diagnostics, this software platform is very intuitive to use.
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