The ELS-BODEN Sigma Series Systems was designed for high speed production environments. This series offers a 400MHz high speed scan clock, which is 4 times faster than our standard products. The electron beam lithography tools offer high current and narrow beam pitch. The 150kV and 125kV systems are for ultra fine patterns, where the 100kV system is designed around the most common nanotechnological applications, while the 50kV tool is geared towards the highest possible speeds.
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