ELS-HAYATE

Key Features:

World’s largest beam current – 800nA
World’s fastest clock speed – 400MHz
5mm square field with large deflection system
- Stitching and stage move times drastically reduced

HIGHER THROUGHPUT THAN EXISTING EBL SYSTEMS

The ELS-HAYATE enables full 8-inch wafer size fabrications of nanoimprint molds within hours. From high-mix to low-volume poduction, the ELS-HAYATE is perfect for large fabrication write fields where high throughput and ultra-fine pattern resolution is required.

Specification

Electron Gun

Acceleration voltage

Beam current

Min. beam spot size

Writing field size

Min. / Max. field size

Scan clock

Beam position

Max. sample size

Max.writing area

Loading system

Software

ZrO/W Thermal Field Emitter

50kV

1nA
~800nA

10nm

5000µm

Min 1000µm square
Max 5000µm square

400MHz

Max 1,000,000 x 1,000,000 (20bit DAC)

8" (200mm) wafer

8" (200mm) square

Single autoloader
Multi autoloader
PEB robot loader

elms

Beam conditions
Exposure schedule
Pattern data converter
Account management
Python scripting

Elionix Lithography Management System

The elms software is a comprehensive electron beam lithography management user interface residing on a Win10 platform. From full production job scheduling, to SEM UI, to system diagnostics, this software platform is very intuitive to use.

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