Elionix ELS-HAYATE

ELS-HAYATE

Key Features:

  • World’s largest beam current – 800nA
  • World’s fastest clock speed – 400MHz
  • 5mm square field with large deflection system
    • Stitching and stage move times drastically reduced

HIGHER THROUGHPUT THAN EXISTING EBL SYSTEMS

The ELS-HAYATE enables full 8-inch wafer size fabrications of nanoimprint molds within hours.  From high-mix to low-volume poduction, the ELS-HAYATE is perfect for large fabrication write fields where high throughput and ultra-fine pattern resolution is required.

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Specification

Electron Gun

Acceleration voltage

Beam current

Min. beam spot size

Writing field size

Min. / Max. field size

Scan clock

Beam position

Max. sample size

Max.writing area

Loading system

Software

ZrO/W Thermal Field Emitter

50kV

1nA
~800nA

10nm

5000µm

Min 1000µm square
Max 5000µm square

400MHz

Max 1,000,000 x 1,000,000 (20bit DAC)

8" (200mm) wafer

8" (200mm) square

Single autoloader
Multi autoloader
PEB robot loader

elms

elms-logo

Beam conditions
Exposure schedule
Pattern data converter
Account management
Python scripting

Website with Boden

Elionix Lithography Management System

The elms software is a comprehensive electron beam lithography management user interface residing on a Win10 platform.  From full production job scheduling, to SEM UI, to system diagnostics, this software platform is very intuitive to use.
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