ELMS Software

Elionix Lithography Management System

The Elionix elms software is a comprehensive suite of modules designed around many years of working in multi-user environments. The elms workflow wraps the entire sequence of software modules into one easy to use platform. The major modules include:

  • ACCO Account management
  • BSCO Beam score tool to check beam quality
  • CALB Calibration for beam and write field
  • CONV Conversion from CAD or GDS/DXF to CAR file
  • EXP Exposure control
  • METR Metrology with automated imaging
  • VAC Vacuum monitor and autoloader control

 

In addition, the elms platform has a Python API and can be controlled through iPython notebooks, for a higher degree of automation.

Specification

Electron Gun

Acceleration voltage

Beam current

Min. beam spot size

Writing field size

Min. / Max. field size

Scan clock

Min. beam position

Max. sample size

Max.writing area

Loading system

Software

ZrO/W Thermal Field Emitter

50kV

100kV

125kV

150kV

1nA
~1µA

20pA
~100nA

5pA
~100nA

5pA
~100nA

D5nm

D1.8nm

D1.7nm

D1.5nm

1000µm

1000um

500µm

500µm

Min lOOµm square
Max (Option) 3000µm square

Max 200MH z

O.lnm (at standard field)

8" (200mm) wafer I 12" (300mm) wafer

8" (200mm) square I 12" (300mm) square

Single autoloader
Multi autoloader
12" (300mm ) FOUP robot loader
PEB robot loader

elms

Beam conditions
Exposure schedule
Pattern data converter
Account management
Python scripting

Inquries Form