ELMS Software

Elionix Lithography Management System

The Elionix elms software is a comprehensive suite of modules designed around many years of working in multi-user environments. The elms workflow wraps the entire sequence of software modules into one easy to use platform. The major modules include:

• ACCO Account management
• BSCO Beam score tool to check beam quality
• CALB Calibration for beam and write field
• CONV Conversion from CAD or GDS/DXF to CAR file
• EXP Exposure control
• METR Metrology with automated imaging
• VAC Vacuum monitor and autoloader control

In addition, the elms platform has a Python API and can be controlled through iPython notebooks, for a higher degree of automation.