Production Tools

ELS-HS50

ELS-HS50

Higher Throughput Than Existing EBL Systems

Reaching sub-micron scales unachievable via laser lithography. Designed for low volume device fabrication with minimal line edge roughness. 

ELS-Boden-E

ELS-BODEN Σ Series Tools

Higher Throughput Than Existing EBL Systems

Reaching sub-micron scales unachievable via laser lithography. Designed for low volume device fabrication with minimal line edge roughness. 

ELF-10000

Surpassing conventional microfabrication systems in throughput

The ELF-10000 enables full 8-inch wafer size fabrications of nanoimprint molds within 24 hours. From production in nanoimprint technology, to high-mix, low-volume production, the ELF-10000 is perfect for the large fabrication write fields of laser fabrication and machining fabrication.

ELF 10000

Elionix Lithography Management System

The elms software is a comprehensive electron beam lithography management user interface residing on a Win10 platform.  From full production job scheduling, to SEM UI, to system diagnostics, this software platform is very intuitive to use.

Global Reach

STS-Elionix is a partnership dedicated to delivering state-of-the-art nanotechnology products throughout North America and Europe. 

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