Production Tools

ELS-HS50

ELS-HS50

Higher Throughput Than Existing EBL Systems

Reaching sub-micron scales unachievable via laser lithography. Designed for low volume device fabrication with minimal line edge roughness. 

ELS-Boden-E

ELS-BODEN Σ Series Tools

Higher Throughput Than Existing EBL Systems

Reaching sub-micron scales unachievable via laser lithography. Designed for low volume device fabrication with minimal line edge roughness. 

ELS-HAYATE

HIGHER THROUGHPUT THAN EXISTING EBL SYSTEMS

The ELS-HAYATE enables full 8-inch wafer size fabrications of nanoimprint molds within hours. From high-mix to low-volume poduction, the ELS-HAYATE is perfect for large fabrication write fields where high throughput and ultra-fine pattern resolution is required.

Elionix ELS-HAYATE

Elionix Lithography Management System

The elms software is a comprehensive electron beam lithography management user interface residing on a Win10 platform.  From full production job scheduling, to SEM UI, to system diagnostics, this software platform is very intuitive to use.

Global Reach

STS-Elionix is a partnership dedicated to delivering state-of-the-art nanotechnology products throughout North America and Europe. 

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